Feedback Posicast Control for Micromachined Electrostatic Actuators

Chong Li,Robert N. Dean,John Y. Hung,George T. Flowers
DOI: https://doi.org/10.1049/mnl.2016.0337
2016-01-01
Micro & Nano Letters
Abstract:Micro-electro-mechanical systems (MEMS) typically have low damping ratios. Although it benefits many applications because they require low energy loss, this characteristic generates large overshoots and long settling times to reach steady state. A feedback posicast controller that can improve the performance of MEMS electrostatic actuators is proposed. This method inserts a posicast controller inside the feedback loop and combines it with a proportional–integral controller. The advantages of this technique include easily implemented control laws, additional velocity sensors or estimators are not required and the parametric adjustment of the controller is less sensitive to the model's nonlinearity. A numerical study verifies that the proposed method is valid.
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