Mems Feedback Control Using Through-Wafer Optical Device Monitoring

JM Dawson,L Wang,J Chen,PF Famouri,LA Hornak
DOI: https://doi.org/10.1117/12.396494
2000-01-01
Abstract:As microelectromechanical systems (MEMS) become widely implemented, the application of closed-loop control methods to MEMS will lead to higher degrees of certainty and reliability of microelectromechanical operation in physically demanding environments. By including planar diffractive optics in these systems, an optical method of determining MEMS microstructure position that is fully decoupled from the means of mechanical actuation can be realized. This paper presents the results of initial research evaluating both open and closed-loop nonlinear proportional-integral-differential (PID) control routines using a 1.3 mum wavelength through-wafer free-space optical probe to obtain a position signal from a lateral comb resonator fabricated using Chronos Integrated Microsystems' Multi-User MEMS Process service (MUMPs). The implementation of sliding control methods is illustrated through simulation results, and the design considerations for a proposed integrated optical monitoring architecture is presented.
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