Nanopositioning control of an electrostatic MEMS actuator: adaptive terminal sliding mode control approach

Fahimeh S. Tabatabaee-Nasab,Naser Naserifar
DOI: https://doi.org/10.1007/s11071-021-06637-3
IF: 5.741
2021-06-30
Nonlinear Dynamics
Abstract:This research proposes an adaptive terminal sliding mode control strategy dedicated to motion tracking control of an electrostatic-actuated nanopositioning system. The electrostatic actuators' dynamics are highly nonlinear as a result of the nature of the electrostatic force on the top plate making challenges to the researchers. This research aimed to provide a strong controller setpoint regulation maneuvers of a micro-mechanical electrostatic actuator system for reducing the vibration impacts on its performance. Forces applied to the electrostatic micro-electromechanical systems (MEMS) actuator are also designed using a nonlinear controller. Appropriate adaptive terminal sliding mode laws are capable of nanoscale positioning resolution, which is generally interpreted as a few nanometers (0.001 nm) and below. Its stability is proven using the Lyapunov theory. The obtained results show the effectiveness of the proposed method (about 50%) to achieve precise positioning. also, tests are given to evaluate the performance of the proposed method when external disturbances are acting on the actuator. These results show that the suggested controller is robust under disturbances.
engineering, mechanical,mechanics
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