Growth and Properties of Nano ZnO
刘少波,顾书林,刘伟,张丹羽,刘雪冬,朱顺明,丁维平,张荣,郑有炓
2008-01-01
Chinese Journal of Luminescence
Abstract:By using low-pressure metal-organic chemical vapor phase deposition(LP-MOCVD) technology, ZnO nanorods were grown with ZnO particles as catalyst on Si(111) substrate's surface. X-ray diffraction (XRD),Raman spectroscopy, scanning electron microscopy(SEM), photoluminescence(PL) were used to characterize the crystalline quality, crystal structure,surface properties and optical properties of the ZnO nanorod samples. The results show that ZnO nanorods have a preferential c-axis orientation. Oxygen partial pressure was found to have important influence on the growth of ZnO nanorods. When oxygen partial pressure is low, the growth of ZnO is based on VLS growth mechanism; when oxygen partial pressure is high, the growth of ZnO is based on VS growth mechanism; ZnO growth can be optimized by changing the flow rate of N2O.Currently the use of MOCVD and ZnO catalyst for the growth of nano-ZnO arrays are less reported. The paper has enriched ZnO nanomaterials synthesizing methods, and the growth control mechanism was discussed.