Abstract:Great interest in nanoscale thin films (sub-100nm) has been stimulated by the developing demands of functional devices. In this paper, nanoscale zinc oxide (ZnO) thin films were deposited on glass substrates at 300°C by pulsed-spray evaporation chemical vapor deposition. Scanning electron micrographs indicate uniform surface morphologies composed of nanometer-sized spherical particles. The growth kinetics and growth mode are studied and the relationship between the film thickness and the electric properties with respect to the growth mode is interpreted. X-ray diffraction shows that all ZnO films grown by this process were crystallized in a hexagonal structure and highly oriented with their c-axes perpendicular to the plane of the substrate. Optical measurements show transparencies above 85% in the visible spectral range for all films. The absorbance in the UV spectral range respects well the Beer–Lambert law, enabling an accurate optical thickness measurement, and the absorption coefficient was measured for a selected wavelength. The measured band gap energies exhibit an almost constant value of 3.41eV for all films with different thicknesses, which attributed to the thickness-independent crystallite size.

Low-temperature Growth of ZnO Nanowire Array on Glass Substrate by Chemical Vapor Deposition

The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties

Hydrothermal Synthesis of Well-Aligned ZnO Nanorod Arrays on Silicon

Low-Temperature Synthesis and Optical Property of ZnO Nanorod Arrays

On the formation of well-aligned ZnO nanowall networks by catalyst-free thermal evaporation method

Comparison of Structural and Optical Properties of ZnO Films Grown on Different Substrates at Low Temperatures

STRUCTURAL AND OPTICAL STUDIES OF ZnO FILMS GROWN AT LOW TEMPERATURE

Low temperature growth and properties of ZnO nanorod arrays

Growth and Formation Mechanism of C-Oriented ZnO Nanorod Arrays Deposited on Glass

Growth of Vertically Aligned ZnO Nanowire Arrays on ZnO Single Crystals

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Preparation and Growth Mechanism of Well-aligned ZnO Nanowires by Chemical Vapor Deposition

Controllable Growth of Well-Aligned Zno Nanorod Arrays by Low-Temperature Wet Chemical Bath Deposition Method

Effects of Substrate on the Structure, Morphology and Optical Properties of Vertically Aligned Zno Nanorod Arrays Grown by Low-Temperature Cbd Method

Single-Crystalline ZnO Nanotube Arrays on Conductive Glass Substrates by Selective Disolution of Electrodeposited ZnO Nanorods

Low-temperature Growth of High C-Orientated Crystalline GaN Films on Amorphous Ni/glass Substrates with ECR-PEMOCVD

Low Temperature Cathodic Electrodeposition of Nanocrystalline Zinc Oxide Thin Films

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Structure of Nanometer ZnO Films Grown at Low Temperature