Preparation and Growth Mechanism of Well-aligned ZnO Nanowires by Chemical Vapor Deposition

TANG Bin,DENG Hong,SHUI Zheng-wei,Jinju Chen,WEI Min
DOI: https://doi.org/10.3969/j.issn.1000-985x.2007.02.012
2007-01-01
Abstract:Well-aligned ZnO nanowires were synthesized on the Si(001) substrate using Au as catalyzer by chemical vapor deposition(CVD).Only(002) diffraction peaks of ZnO could be found on the XRD patterns,which indicated that the ZnO nanowires exhibited(001) preferred orientation.The SEM images show that the average diameters of ZnO nanowires is 100nm and average lengths is 4μm.They were aligned on Si substrate well.The ZnO thin films with thickness of 500nm was deposited on Si substrate firstly and ZnO nanowires grow on the ZnO thin films,which is totally different from V-L-S mechanism.
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