Abstract:The fabrication and testing results of a 65-pin ceramic packaged 4 x 4 arrayed position sensitive detector are presented. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-in. < 111 > n-type high resistance crystal silicon substrates. A 100-nm antireflection SiO2 thin film is formed on the surface, along with a multilayer cover glass with transmissivity > 98% from 400 to 950 nm. Primary tests of the device show that it has a low dark current, high spectral sensitivity, very fast response speed, and very good linearity. The dark current of an element unit is less than 20 nA, which is the allowable maximum dark current. The peak spectral sensitivity of the sensor is over 505 mA/W at 800-nm wavelength. Its response time is 8 ns at 45-V reverse bias and the nonlinearity of the total sensitive area is less than 1%. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

Application of Position Sensitive Detector in Tilted Angle Measuement

Research on the 1D PSD

Research on high-speed and non-contact angle detection based on laser measurement

Resolution Improvement of One-Dimensional Comb-Type PSD by Subdivision

Design and experiment of a 2 DOF laser scanner and deflection angle measurement system

Optical Tilt Sensor with Direct Intensity-Modulated Scheme

Comparison and Design of Two Different Deflection Angle Measurement System for a 2 DOF Laser Scanner

Study of Rotation Axis Measurement System Based on PSD

High-Precision Attitude Angle Measuring System Based on Talbot Interferometry

Research of the Testing System of Characteristics of Electrical Vibration Table Based on PSD

Fabrication and Characterization of a New Type 4×4 Arrayed Position-Sensitive Detector

Fabrication and characterization of a new type 4 × 4 arrayed position sensitive detector

Design Realization and Characterization of A Position Sensitive Detector for Fast Optical Measurement

Research on the performance parameter of 2D position sensitive detector

The Current-position Characteristics of Two Dimensional Positio n Sensitive Detectors with Different Anode Structure

Research Based on QPD Single-lens Micro-angle Measurement System and Its Key Technology

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

2D Micro-Angle Sensor Based on Laser Autocollimation

High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector

Design and Performance Analysis of Laser Displacement Sensor Based on Position Sensitive Detector (Psd)

Measure Passive Incident Laser Beam'S Space Direction by Use of the Psd