Fabrication of Immune Globulin Sensor Based on Film Bulk Acoustic Resonator

YANG Han-lin,CHEN Da,LIU Yi-jian,SHEN Yong,ZHANG Ya-fei
DOI: https://doi.org/10.13873/j.1000-9787(2015)08-0080-03
2015-01-01
Abstract:An immune globulin( IG) sensor based on thin film bulk acoustic resonator( FBAR) is presented,which works at 2. 047 GHz with- 32 d B return loss,consisting of an Al N piezoelectric stack and three pairs of Ti / W Bragg reflector. Self-assembled monolayers( SAMs) are applied to modify the top Au electrode sensitive area. Index changes of sensor before and after combination of antigen and antibody of IG are test. The Q factor of sensor is calculated as high as 846 and the sensitivity as a biosensor can reach 3. 38 k Hz·cm2/ ng which much higher than that of QCM. Through the antibody detection experiment,the FBAR is proved to have the potential of exhibiting a more crucial effect in the biosensor field.
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