Quality Factor of Planar Micro-toroid Cavities on Chip

YAN Ying-zhan,YAN Shu-bin,WANG Shao-hui,XIONG Ji-jun
2008-01-01
Nanoscience and Nanotechnology
Abstract:As a new kind of optic microcavity,planar micro-toroid cavity maintains the high quality factor(Q) and the advantage of batch production as well as easy integration with other parts.The paper analyzed and simulated the various factors to the quality factor of planar micro-toroid cavities.Based on this,the design and processing of high-Q planar micro-toroid cavities are discussed.
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