STUDY OF DEPOSITION AND ANNEALING OF CdTe FILMS

蔡伟,冯良桓,蔡亚平,张静全,武莉莉
DOI: https://doi.org/10.3969/j.issn.0490-6756.2002.02.022
2002-01-01
Abstract:s: CdTe films have been prepared by closed-space sublimation method. Film crystalline depending on substrate materials and substrate temperature is studied. It has been found that films show higher crystallinity on substrate temperature above 400℃. And the CdTe films deposited on CdS films with higher crystallinity has bigger crystallite and higher uniformity. The results of heat treatment of CdTe films show that the using of CdCl 2 promotes the crystallite growth of CdTe films in annealing course.
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