Study on close-space sublimating and depositing process of CdTe Polycrystalline films' Preparation

Huajing Zheng,Jingquan Zhang,Lianghuan Feng,Jiagui Zheng,Erqing Xie

DOI: https://doi.org/10.3321/j.issn:1002-0470.2005.11.012

2005-01-01

Abstract:The structure and characteristics of CdTe thin films are dependent on the whole deposition process in closed-space sublimation. It can be helpful to prepare the thin and compact CdTe thin films with fine photoelectric characteristics to study the heat exchange and mass transportation in CSS process. In this paper, the physical mechanism of CSS is analyzed, and the temperature distribution in CSS system is measured, and the dependence of preliminary nucleus creation on increasing-temperature process and pressure is studied. So the increasing-temperature curve has been optimized, the production of high-quality integrated cells with SnO 2:F/CdS/CdTe/Au structure are made possible. The results indicate: The physics process of the close space sublimation includes: the preliminary increasing-temperature process of the CdTe before sublimation. The process that CdTe source sublimates and decomposes into the Cd and the Te 2. The course of combining process of Cd, and the Te 2 on substrate, the course of CdTe resublimating on substrate. In the course of the normal close-spaced sublimation, CdTe vapor pressure is far smaller than the protecting atmosphere. The effect of the latter to grow nucleus is small. But it affects the growth velocity of the thin film from changing the molecular mean free path to affect the diffusion of Cd and Te 2.