Molecular Design of Photosensitive Polyimides for Microelectronics

李元勋,唐先忠,何为,韩莉坤
DOI: https://doi.org/10.3321/j.issn:1005-023x.2004.12.013
2004-01-01
Abstract:Photosensitive polyimides (PSPIs) have attracted much attention due to their high thermal stabilities, low dielectric constants, chemical inertia and excellent mechanical properties, which are considered as promising organic functional materials. The new ideas of preparation for novel photosensitive polyimides are brought out in this paper based on PSPIs in the markets through molecular design. The related synthetic methods for preparation of PSPIs are introduced in details according to the principles of organic synthesis, and methods to improve properties of PSPIs are also included.
What problem does this paper attempt to address?