Negative-tone Photosensitive Polyimide with High Transparency

Jia-xin Ma,Li-li Yuan,Sheng-nan Fan,Li-zhe Wang,Bin Jia,Hai-xia Yang,Shi-yong Yang
DOI: https://doi.org/10.1016/j.eurpolymj.2023.112071
IF: 6
2023-04-20
European Polymer Journal
Abstract:Negative-tone photosensitive polyimides (n-PSPI) with high transparency at visible wavelength region (400-700 nm) were prepared by dissolving photosensitive polyimide precursor -poly(amide ester)(PAE) resins, photoinitiator, photocrosslinker and other additives in organic solvents. The PAE resins were synthesized by polycondensation of a fluorinated aromatic diamine with an aromatic diester dichloride or its mixture. The n-PSPI coating solutions showed good photolithographic performance with resolution of 8μm (via) and 7μm (line) at 5μm of the thermally cured film thickness. After thermally cured at 350 o C/1h, the typical PSPI film exhibited excellent thermal properties with T g of 344 o C and T d5 of 525 o C, respectively. The mechanical properties with elongation at breakage of as high as 42.2% and tensile strength of 133.7MPa were also measured. Additionally, the thermally cured PSPI films exhibited excellent transparency with UV cuttoff wavelength of 362nm, transmittance of 90.5% at 450 nm, and 95.5% at 550 nm, as well as yellowness indices of less than 6.55. Furthermore, theoretical simulations were used to prove that trifluoromethyl group in the backbone structure of PSPI precursor resin can effectively improve the transparency of PSPI films.
polymer science
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