Mechanical Properties of TiN Coatings Studied Via Nanoindentation and Nanoscratch Test

Huazhi Zeng,Hai Wang,Jun Shen
DOI: https://doi.org/10.1116/1.4941932
2016-01-01
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Abstract:TiN coatings were deposited with various Ar/N2 gas flow ratios by arc ion plating. Coating microstructure and mechanical properties were investigated through grazing incidence x-ray diffraction (GIXRD), scanning electron microscopy, digital microscopy, nanoindentation, and nanoscratch test. GIXRD indicated that TiN coatings initially grew along the (111) and (200) planes, and then the intensity of the peaks decreased as the Ar/N2 gas flow ratio was reduced. TiN coatings exhibited a high hardness value (22.3–26.3 GPa). Coatings with a high hardness-to-modulus ratio (H/Er) were found to crack dramatically under low critical load. The depth of the nanoscratches decreased as the H/Er ratio was reduced, indicating that the wear resistance of the coatings increased as the Ar/N2 gas flow ratio was augmented. TiN coatings with high Ar/N2 gas flow ratio achieved high hardness value, excellent elastic recovery under low loads, high adhesive strength, and strong wear resistance.
What problem does this paper attempt to address?