Abstract:Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group-TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group-TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group-TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N).

Effect of N2 / Ar Gas Flow Ratio on the Deposition of TiN/Ti Coatings on NiTi Shape Memory Alloy by PIIID

EFFECT OF THE N2/Ar FLOW RATIO ON THE MICROSTRUCTURE AND MECHANICAL PROPERTIES OF TiSiCN COATINGS

Effect of N2/Ar Ratio on Wear Behavior of Multi-Element Nitride Coatings on AISI H13 Tool Steel

Surface Characterization and Electrochemical Studies of Biomedical Niti Alloy Coated with Tin by Piiid

Deposition of TiN coatings on shape memory NiTi alloy by plasma immersion ion implantation and deposition

EFFECT OF C2H2 FLOW RATE ON THE DEPOSITION OF TI-TIC-TIC/DLC GRADIENT NANO-COMPOSITE FILM ON NITI ALLOY

Influence of Substrate and Ar/N 2 Gas Flow Ratio on Structural, Optical and Electrical Properties of TiN Thin Films Synthetized by DC Magnetron Sputtering

Formation of TiN films on biomedical NiTi shape memory alloy by PIIID

Characterization of TiN, TiC and TiCN coatings on Ti–50.6 at.% Ni alloy deposited by PIII and deposition technique

A Study Of Zrn/Zr Coatings Deposited On Niti Alloy By Piiid Technique

Surface Characterization and Mechanical Property of Tin/Ti-Coated Niti Alloy by Piiid

Effect of Sputtering Deposition Parameters on Mechanical Properties,Microstructure and Composition of TiAlN Coatings

Influence of the Nitrogen Flux Ratio on the Structural, Morphological and Tribological Properties of TiN Coatings

Effect of Nitrogen Protective Atmosphere on Microstructure and High Temperature Erosion Property of TiAl3 and Cr3C2 Composite Coatings

The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings

Effects of Nitrogen Ion Implantation and Implantation Energy on Surface Properties and Adhesion Strength of TiN Films Deposited on Aluminum by Magnetron Sputtering

Modification of Biomedical NiTi Shape Memory Alloy by TiC/Ti Films Using PIIID

Effect of Ni content on the microstructure and mechanical properties of TiNiN coatings

Effects of titanium nitride coatings on surface and corrosion characteristics of Ni-Ti alloy

Effect of Plasma Nitriding Substrate Current Density on the Adhesion Strength of in Situ PVD TiN Coatings

Effect of the DLC coating on the surface properties of the NiTi alloys