Abstract:Abstract Large, 3D curved electronics are a trend of the microelectronic industry due to their unique ability to conformally coexist with complex surfaces while retaining the electronic functions of 2D planar integrated circuit technologies. However, these curved electronics present great challenges to the fabrication processes. Here, we propose a reconfigurable, mask-free, conformal fabrication strategy with a robot-like system, called robotized ‘transfer-and-jet’ printing, to assemble diverse electronic devices on complex surfaces. This novel method is a ground-breaking advance with the unique capability to integrate rigid chips, flexible electronics, and conformal circuits on complex surfaces. Critically, each process, including transfer printing, inkjet printing, and plasma treating, are mask-free, digitalized, and programmable. The robotization techniques, including measurement, surface reconstruction and localization, and path programming, break through the fundamental constraints of 2D planar microfabrication in the context of geometric shape and size. The transfer printing begins with the laser lift-off of rigid chips or flexible electronics from donor substrates, which are then transferred onto a curved surface via a dexterous robotic palm. Then the robotic electrohydrodynamic printing directly writes submicrometer structures on the curved surface. Their permutation and combination allow versatile conformal microfabrication. Finally, robotized hybrid printing is utilized to successfully fabricate a conformal heater and antenna on a spherical surface and a flexible smart sensing skin on a winged model, where the curved circuit, flexible capacitive and piezoelectric sensor arrays, and rigid digital–analog conversion chips are assembled. Robotized hybrid printing is an innovative printing technology, enabling additive, noncontact and digital microfabrication for 3D curved electronics.

Laser Direct Writing Technology for Printing Mesh on Convex Surface

Research on the optical field distribution and micro-fabrication model in convex-surface laser lithography

High-throughput and Parallel Direct Laser Writing System Based on Screen Division Multiplexing of Spatial Light Modulator

High Throughput Laser Nano Direct Writing Technique

Laser Direct Writing System and Its Lithography Properties

Laser Direct Writing Using Submicron-Diameter Fibers.

Photolithography Using Lateral Surface of Nanofibers

Realization of Autofocusing System for Laser Direct Writing on Non-Planar Surfaces.

A novel design for maskless direct laser writing nanolithography: Combination of diffractive optical element and nonlinear absorption inorganic resists

Investigation of laser marking technology with the image mask of liquid crystal display

Scalable Shape-Controlled Fabrication of Curved Microstructures Using a Femtosecond Laser Wet-Etching Process

Optical microlithography on oblique and multiplane surfaces using diffractive phase masks

Programmable robotized ‘transfer-and-jet’ printing for large, 3D curved electronics on complex surfaces

Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System

Maskless Microscopic Lithography Through Shaping Ultraviolet Laser with Digital Micro-mirror Device

Electric Field-Driven Jetting and Water-Assisted Transfer Printing for High-Resolution Electronics on Complex Curved Surfaces

Design Of High Precise Focusing System In Laser Direct Writer

Hybrid Nanoimprint-Soft Lithography for Highly Curved Surface with Sub-15 Nm Resolution

Electrohydrodynamic Direct-Writing Lithography: an Alternative Maskless Technique for Microstructure Fabrication

Direct writing concave structure on viscoelastic substrate for loading and releasing liquid on skin surface

Design and Fabrication of Diffractive Microlens Arrays with Continuous Relief for Parallel Laser Direct Writing.