Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Precision influence of a phase retrieval algorithm in fractional Fourier domains from position measurement error.

Optimization of Transverse Translation Diverse Phase Retrieval for Optical Elements with Mid-Spatial Frequency Errors

Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Phase Retrieval Wavefront Measurement Model Based on the Numerical Fourier Theory

Phase Error Correction by &Lt;inline-Formula><math Display="inline" Overflow="scroll"><mi>π</mi></math></inline-Formula>-shift Odd-Step Fringe Projection and Speckle Filtering in Phase Measuring Profilometry

Iterative Phase Retrieval with a Sensor Mask.

A Positional Misalignment Correction Method for Fourier Ptychographic Microscopy Based on the Quasi-Newton Method with a Global Optimization Module

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Simultaneous Reconstruction of Phase and Amplitude for Wavefront Measurements Based on Nonlinear Optimization Algorithms

Quantitative Phase Imaging Based on Wavefront Correction of a Digital Micromirror Device

Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

Cross-iteration Multi-Step Optimization Strategy for Three-Dimensional Intensity Position Correction in Phase Diverse Phase Retrieval.

Iterative Phase-Amplitude Retrieval with Multiple Intensity Images at Output Plane of Gyrator Transforms

Deterministic-Iterative Integrated Phase Retrieval

Single-shot Phase Retrieval from a Fractional Fourier Transform Perspective

An improved phase retrieval algorithm for optical aspheric surface measurement

Recursive Algorithm for Phase Retrieval in the Fractional Fourier Transform Domain.

The Influence of Phase-Shifting Algorithms on the Instrument Transfer Function in a Fizeau Interferometer

A Phase Retrieval Algorithm for Complex Optical Field

Phase Retrieval of X-ray Phase Contrast Imaging Based on Iterative Algorithm