Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

A Phase Retrieval Algorithm for Complex Optical Field

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Complex Optical Field Retrieved from Intensity Distributions on Several Fractional Fourier Transform Planes

Large-scale Phase Retrieval Method for Wavefront Reconstruction with Multi-Stage Random Phase Modulation

Non-propagation Fast Phase Diverse Phase Retrieval for Wavefront Measurement with Generalized FFT-based Basis Function.

Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Hybrid Iterative Phase Retrieval Algorithm Based on Fusion of Intensity Information in Three Defocused Planes.

Accurate Phase Retrieval Algorithm Based on Linear Correlation in Self-Calibration Phase-Shifting Interferometry with Blind Phase Shifts

Optimization of Transverse Translation Diverse Phase Retrieval for Optical Elements with Mid-Spatial Frequency Errors

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Phase Retrieval with PhaseLift Algorithm

Phase Retrieval of Complex Optical Fields by Binary Amplitude Modulation

Phase Retrieval of X-ray Phase Contrast Imaging Based on Iterative Algorithm

Phase Retrieval in the Fresnel Transform System: A Recursive Algorithm

Novel Algorithms for Phase Retrieval

A New Method For Phase Retrieval In The Optical System

Hybrid Iterative Phase Retrieval Algorithm Based on the Fusion of Intensity Information in Several Planes

Phase Retrieval in Arbitrarily Shaped Aperture with the Transport-of-intensity Equation

Generalized Iterative Phase Retrieval Algorithms and Their Applications

Deterministic-Iterative Integrated Phase Retrieval

Iteration-Free-Phase Retrieval for Directive Radiators Using Field Amplitudes on Two Closely Separated Observation Planes