Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Hybrid Iterative Phase Retrieval Algorithm Based on the Fusion of Intensity Information in Several Planes

Hybrid Iterative Phase Retrieval Algorithm Based on Fusion of Intensity Information in Three Defocused Planes.

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Iterative Phase-Amplitude Retrieval with Multiple Intensity Images at Output Plane of Gyrator Transforms

Fast Autofocusing Strategy for Phase Retrieval Based on Statistical Gradient Optimization

A Phase Retrieval Algorithm for Complex Optical Field

Non-propagation Fast Phase Diverse Phase Retrieval for Wavefront Measurement with Generalized FFT-based Basis Function.

Simultaneous Reconstruction of Phase and Amplitude for Wavefront Measurements Based on Nonlinear Optimization Algorithms

Optimization of Transverse Translation Diverse Phase Retrieval for Optical Elements with Mid-Spatial Frequency Errors

Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Modal-based Adaptive Autofocusing Phase Retrieval for Wavefront Measurement

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Cross-iteration Multi-Step Optimization Strategy for Three-Dimensional Intensity Position Correction in Phase Diverse Phase Retrieval.

Phase Retrieval of X-ray Phase Contrast Imaging Based on Iterative Algorithm

Deterministic-Iterative Integrated Phase Retrieval

Complex Optical Field Retrieved from Intensity Distributions on Several Fractional Fourier Transform Planes

Generalized Iterative Phase Retrieval Algorithms and Their Applications

Iteration-Free-Phase Retrieval for Directive Radiators Using Field Amplitudes on Two Closely Separated Observation Planes

A New Method For Phase Retrieval In The Optical System

Phase Retrieval in the Fresnel Transform System: A Recursive Algorithm

Align-free multi-plane phase retrieval