Scanning Probe Nanopatterning and Layer-by-Layer Thinning of Black Phosphorus.

Xiaolong Liu,Kan-Sheng Chen,Spencer A Wells,Itamar Balla,Jian Zhu,Joshua D Wood,Mark C Hersam
DOI: https://doi.org/10.1002/adma.201604121
IF: 29.4
2017-01-01
Advanced Materials
Abstract:Nanopatterning and layer-by-layer thinning of black phosphorus is demonstrated with conductive atomic-force-microscope anodic oxidation. The liquid-phase patterning byproduct is readily removed by water rinsing. An alternating-current bias enables direct nanopatterning and thinning on insulating substrates such as SiO2/Si. Field-effect transistors with patterned channels show significant improvements in current modulation by up to a factor of 50.
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