Synthesis of High-Quality Large-Area Homogenous 1t ' Mote2 from Chemical Vapor Deposition

Lin Zhou,Ahmad Zubair,Ziqiang Wang,Xu Zhang,Fangping Ouyang,Kai Xu,Wenjing Fang,Keiji Ueno,Ju Li,Tomas Palacios,Jing Kong,Mildred S. Dresselhaus
DOI: https://doi.org/10.1002/adma.201602687
IF: 29.4
2016-01-01
Advanced Materials
Abstract:High-quality large-area few-layer 1T' MoTe2 films with high homogeneity are synthesized by the controlled tellurization of MoO3 film. The Mo precursor plays a key role in determining the quality and morphology of the 1T' MoTe2 . Furthermore, the amount of Te strongly influences the phase of the MoTe2 . The growth method paves the way toward the scalable production of 1T' MoTe2 -based applications.
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