Fast Solid-Phase Synthesis of Large-Area Few-Layer 1T’-Mote2 Films

Sheng Xie,Lin Chen,Tian-Bao Zhang,Xin-Ran Nie,Hao Zhu,Shi-Jin Ding,Qing-Qing Sun,David Wei Zhang
DOI: https://doi.org/10.1016/j.jcrysgro.2017.03.013
IF: 1.8
2017-01-01
Journal of Crystal Growth
Abstract:In this study, we report on a novel approach to produce similar to 12 nm thick few-layer monoclinic 1T'-MoTe2 films. The deposition method comprised sputtering of Mo, molecular beam epitaxy of Te, and rapid thermal processing to effect tellurization of the Mo into 1T'-MoTe2. The heating rate and annealing time are the critical factors. 30 degrees C s (1) heating rate and 2 min annealing at 470 degrees C were adopted in this work. X-ray photoelectron spectroscopy confirmed the formation of stoichiometric 1T'-MoTe2 films, while X-ray diffraction confirmed the monoclinic polymorph. Raman spectroscopy confirmed spatial uniformity over the sample size of 1 cm x 1.5 cm. Our fast synthesis approach to realize high-quality 1T'-MoTe2 paves the way towards the large-scale application of 1T'-MoTe2 in high-performance nanoelectronics and optoelectronics. (C) 2017 Elsevier B.V. All rights reserved.
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