Optical Fabrication and Characterisation of SU-8 Disk Photonic Waveguide Heterostructure Cavities.

Luke P. Nuttall,Frederic S. F. Brossard,Stephen A. Lennon,Benjamin P. L. Reid,Jiang Wu,Jonathan Griffiths,Robert A. Taylor
DOI: https://doi.org/10.1364/oe.25.024615
IF: 3.8
2017-01-01
Optics Express
Abstract:In order to demonstrate cavity quantum electrodynamics using photonic crystal (PhC) cavities fabricated around self-assembled quantum dots (QDs), reliable spectral and spatial overlap between the cavity mode and the quantum dot is required. We present a method for using photoresist to optically fabricate heterostructure cavities in a PhC waveguide with a combined photolithography and micro-photoluminescence spectroscopy system. The system can identify single QDs with a spatial precision of ±25 nm, and we confirm the creation of high quality factor cavity modes deterministically placed with the same spatial precision. This method offers a promising route towards bright, on-chip single photon sources for quantum information applications.
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