Abstract:Nanophotonic resonators are central to numerous applications, from efficient spin-photon interfaces to laser oscillators and precision sensing. A leading approach consists of photonic crystal (PhC) cavities, which have been realized in a wide range of dielectric materials. However, translating proof-of-concept devices into a functional system entails a number of additional challenges, inspiring new approaches that combine: resonators with wavelength-scale confinement and high quality factors; scalable integration with integrated circuits and photonic circuits; electrical or mechanical cavity tuning; and, in many cases, a need for heterogeneous integration with functional materials such as III-V semiconductors or diamond color centers for spin-photon interfaces. Here we introduce a concept that generates a finely tunable PhC cavity at a select wavelength between two heterogeneous optical materials whose properties satisfy the above requirements. The cavity is formed by stamping a hard-to-process material with simple waveguide geometries on top of an easy-to-process material consisting of dielectric grating mirrors and active tuning capability. We simulate our concept for the particularly challenging design problem of multiplexed quantum repeaters based on arrays of cavity-coupled diamond color centers, achieving theoretically calculated unloaded quality factors of $10^6$, mode volumes as small as $1.2(\lambda/n_{eff})^3$, and maintaining >60 percent total on-chip collection efficiency of fluorescent photons. We further introduce a method of low-power piezoelectric tuning of these hybrid diamond cavities, simulating optical resonance shifts up to ~760 GHz and color center fluorescence tuning of 5 GHz independent of cavity tuning. These results will motivate integrated photonic cavities toward larger scale systems-compatible designs.

Design and Fabrication of Robust Hybrid Photonic Crystal Cavities

Fabrication of Optical Cavities with Femtosecond Laser Pulses

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High-Q Cavity Interface for Color Centers in Thin Film Diamond

Scalable construction of hybrid quantum photonic cavities

High-Q Photonic Crystal Microcavities

Hybrid Integration of GaP Photonic Crystal Cavities with Silicon-Vacancy Centers in Diamond by Stamp-Transfer

High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

Hybrid Devices for Cavity QED in Solid State Systems

High- Q Microcavity in Two-Dimensional Diamond Photonic Crystal Thin Films Realized Via a Mode Gap

Fabrication of Sawfish photonic crystal cavities in bulk diamond

Design and Fabrication of High-Quality Two-Dimensional Silicon-Based Photonic Crystal Optical Cavity with Integrated Waveguides

High-Q optical nanocavities in bulk single-crystal diamond

High quality-factor optical nanocavities in bulk single-crystal diamond

One- and two-dimensional photonic crystal micro-cavities in single crystal diamond

Optimal photonic crystal cavities for coupling nanoemitters to photonic integrated circuits

Optimized Design For 2 X 10(6) Ultra-High Q Silicon Photonic Crystal Cavities

Silicon Carbide Photonic Crystal Cavities with Integrated Color Centers

Free-standing silicon nitride nanobeams with efficient fiber-chip interface for cavity QED

Processing of Photonic Crystal Nanocavity for Quantum Information in Diamond