Abstract:This paper proposes a low-area multi-band terahertz (THz) detector structure for spectroscopic imaging, which consists of several narrow-band THz detectors with different detection frequencies. By combining the output of the narrowband detectors, broadband detection is realized. The detection frequency can be expanded by adding more narrow-band detectors with different detection bands. To reduce the whole area of the detector, a loop antenna is used in each narrow-band detector to realize a nestable architecture, where the high frequency antennas are successively placed in the low-frequency antennas with the same center position. The area is determined only by the narrow-band detector with the lowest detection frequency. Each of the narrow-band detectors adopts a conventional self-mixing detection structure, including a FET based power detection circuit, an on-chip loop antenna, and a matching network. Two spiral structures are proposed as the matching network to improve the performance of each narrowband detector. Using the multi-band detector structure, a detector with 8 frequency bands has been implemented in 65 nm CMOS process, which achieves effective detection in the 75-1100 GHz range with an area of only 244×244 μm2. A peak voltage responsivity (Rv) of 1.4 kV/W and a minimum noise equivalent power (NEP) of 17 pW/Hz1/2 are achieved. A set of spectrum analysis experiments and imaging experiments verify the practicability of the multi-band detector structure.

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