Abstract:Theoretical studies on the vibration of microcantilever beams in fluids, which are commonly used in micro- and nanoelectromechanical systems (MEMS/NEMS). When microcantilever beams are subjected to photo-thermal excitation, they show that the material properties such as the dynamic response and the one-dimensional temperature field will show significant differences from the macroscopic properties when the size appearance of the microbeam decreases to the scale below a dozen micrometers. In this paper, by correcting the scale constants of the beams, the photothermal vibration model of the microbeam is established using the physical neutral plane theory. The one-dimensional heat transfer equations and scale-corrected temperature field of the microcantilever beam under laser excitation are derived, which are solved by Galerkin's method, based on the theory of thermoelasticity, the hydrodynamic model of the beams vibrating in incompressible liquids proposed by Sader et al. and the theory of Euler-Bernoulli beams. The equations governing the vibration of micro-cantilever beams corrected for scale effects in different fluids when subjected to photothermal excitation are obtained. The results show that the temperature field, resonant frequency, and quality factor of the microbeam will have a significant upward drift when the size of the microbeam is close to the scale parameter, and the scale effect has a non-negligible influence on the macroscopic performance parameters; the upward drift is gradually weakening when the thickness to scale ratio gradually increases. Finally, the property of the beam is almost the same as that of the theory when the thickness of the beam is 10 times the scale constant. The correction of the theory by the scale effect is insignificant.

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Investigation of the Photothermal Excited Microcantilevers Based on Modified Couple Stress Theory

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