CO 2 ‐Based Dual‐Tone Resists for Electron Beam Lithography

Xin‐Yu Lu,Hao Luo,Kai Wang,Yao‐Yao Zhang,Xiao‐Feng Zhu,Dongxue Li,Bingze Ma,Shisheng Xiong,Paul F. Nealey,Qiang Li,Guang‐Peng Wu

DOI: https://doi.org/10.1002/adfm.202007417

IF: 19

2020-11-30

Advanced Functional Materials

Abstract:<p>The increasing global environmental and energy crisis has urgently motivated the advancement of sustainable materials. Significant effort has been focused on developing new materials to replace the fossil‐based resists in the semiconductor industry based on greener sources such as ice, dry ice, small organic molecules, and proteins. Such resist materials, however, have yet to meet the stringent requirements of high sensitivity, high resolution, reliable repeatability, and good compatibility with the current protocols. To this end, CO₂‐based polycarbonates (CO₂‐PCs) obtained from the copolymerization of CO₂ and epoxides are demonstrated as sustainable dual‐tone (positive &amp; negative tone) resists for electron beam lithography. By adjusting the chemical structure, developing agent, and molecular weight, the CO₂‐PCs present high sensitivities to electron beam (1.3/120 <b>µ</b>C cm⁻²), narrow critical dimensions (29/58 nm), and moderate line edge roughness (4.6/26.7 nm) for negative and positive resists, respectively. A deep understanding of the exposure mechanism of CO₂‐PC resists is provided on the basis of the Fourier transform infrared, Raman, and electron ionization mass spectroscopy. 2D photonic crystal devices are fabricated using the negative and positive CO₂‐PC resists, respectively, and both devices show distinct colors derived from their well‐defined nanostructures, indicating the great practical potential of CO₂‐derived electron beam resists.</p>

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to find sustainable electron - beam lithography (EBL) resist materials in the semiconductor industry to replace the current resist materials based on fossil fuels. With the intensification of the global environmental and energy crises, the development of green and renewable materials has become an urgent need. Although some resists based on natural and recyclable resources, such as ice, dry ice, small organic molecules and proteins, etc., have been developed, these materials have not fully met the industrial requirements in terms of high sensitivity, high resolution, reliable repeatability and good compatibility with existing processes. Therefore, this paper studies carbon - dioxide - based polycarbonates (CO₂ - PCs) obtained by copolymerization of carbon dioxide (CO₂) and epoxides as sustainable two - color (positive - negative type) electron - beam lithography resists, and explores their performance and application potential in electron - beam lithography.