Abstract:With the widespread application and diversified demands of micro electro mechanical systems(MEMS),it is difficult to meet the design requirements of non-standard for the current design method of structure combination in the parametric elements library.Therefore,a method of mapping extraction and equivalent approximation of multi-granularity macro-model which supports non-standard structure design is presented.In the MEMS design level and flow of multi-granularity macro-modeling,the global matrix which describes the system is extracted through association and combination of nodes of complete finite element model of the MEMS device.The precise system model based on the low-order ordinary differential equations is then achieved.The large-scale sparse symmetric matrix is saved via one-dimensional variable bandwidth storage.The equivalent approximation model is obtained by Lagrange polynomial fitting and generalized minimal residuals.The fidelity relationships between the input and output of the system of the non-standard structure are built to connect the models of connector level and system level.The product continuous is finally realized via design iteration.The independent prototype system using ACIS as geometry modeling kernel is developed to verify the proposed method by a digital light procession micro-mirror.The test results prove that the present design ability is extended from limited simple devices in element library to the complex,strange,non-standard structure.It has important significance to improve efficiency and quality of the design of MEMS.

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