Terahertz Transmission Properties of VO2 Thin Films Deposited on C-and M-Plane Sapphire Substrates by Pulsed Laser Deposition

Xiao Qiang Kou,Ji Ming Bian,Zhi Kun Zhang
DOI: https://doi.org/10.4028/www.scientific.net/amr.710.25
2013-01-01
Advanced Materials Research
Abstract:Vanadium dioxide (VO2) films were grown on c-and m-plane sapphire substrates by pulsed laser deposition (PLD) technique with VO2ceramic target. The VO2films with preferred growth orientation and uniform dense distribution have been achieved on both substrates, as confirmed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The terahertz (THz) transmission properties of VO2thin films were studied by terahertz time-domain spectroscopy (THz-TDS). The results indicate that the THz transmission properties of VO2films are strongly influenced by the sapphire substrate orientation, suggesting that VO2films are ideal material candidates for THz modulation.
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