Analysis on the Individual Stiffness of the Aerostatic Guide Way and Error Sources of Its Vibration

Jiejun Lin,Dongsheng Li,Wen Zhang

DOI: https://doi.org/10.4028/www.scientific.net/amr.472-475.862

2012-01-01

Advanced Materials Research

Abstract:At present, the aerostatic guide way is more and more important in the ulta-precision engineering areas, and it is analyzed in this paper. The individual stiffness of the guide, the air film stiffness and the micro-error aroused by the random air vibration of four different bearings, whose cross sections are square, triangular, trapezoid and ∏-shaped, are got one by one. A series of analysis and deductions could draw a conclusion that the aerostatic guide way with ∏-shaped cross section is recommended for obtaining the high machining and measuring accuracy, especially for the horizontal-type use and under low load. In addition, the research in this paper is valuable for the engineers.