Error modeling and analysis of an ultra-precision stage with an aerostatic bearing

Tian Cai,Ming Zhang,Yu Zhu,Jinchun Hu
2011-01-01
Abstract:The static error of an ultra-precision stage is caused by various factors. This paper presents an error model for an ultra precision stage using rigid body kinematics for high accelerations and a large travel range. The parametric error model for the stage's errors is in terms of the linear positioning error, roll, pitch and yaw. The model describes the influence of the acceleration, manufacturing errors, structure flexibility and stiffness of the aerostatic bearing. The results show that insufficient angle stiffness of the aerostatic bearing is the main factor for the static error for high acceleration and large travel motion.
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