Effects of Pb5Ge3O11on Pyroelectric Lead–zirconate–titanate Thick Films Deposited on Silicon Substrate by Electrophoresis Deposition

Chuan Gui Wu,Qiang Xiang Peng,Xiang Yu Sun,Jia Meng,Shuai Yao,Wen Bo Luo,Wan Li Zhang
DOI: https://doi.org/10.7567/jjap.54.04dh14
IF: 1.5
2015-01-01
Japanese Journal of Applied Physics
Abstract:The effects of Pb5Ge3O11 (PGO) sintering additive on the sintering temperature (T-s) and pyroelectric properties of 1 x 1 mm(2) lead-zirconate-titanate (PZT) thick films on Pt/Ti/SiO2/Si substrates were studied. The pattern of PGO-added PZT thick films were formed directly by electrophoresis deposition (EPD). The PGO percentage and T-s were optimized at the range from 0 to 9 wt% and 700 to 900 degrees C, respectively. The energy dispersive spectrometer (EDS) results showed that the diffusion between Si and PZT were weaken gradually as the T-s decreased. The sintered PZT films sintered at 800 degrees C with 3wt% PGO exhibited room-temperature pyroelectric coefficient (P-c) of 1.73 x 10(-8) C/(cm(2).K), figure of merit for detectivity (FD) of 1.9 x 10(-5) Pa-0.5, permittivity of 330 and dielectric loss of 1.5% (1 kHz), respectively. These results demonstrate that the directly patterned PGO-added PZT thick films fabricated by EPD show potential application in MEMS detectors. (C) 2015 The Japan Society of Applied Physics
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