Simplified Boundary Modeling for Resonating Structures by Scattering Analysis

Florian Thalmayr,Ken-ya Hashimoto,Masanori Ueda,Tatsuya Omori,Masatsune Yamaguchi
DOI: https://doi.org/10.1143/jjap.50.020211
IF: 1.5
2011-01-01
Japanese Journal of Applied Physics
Abstract:In this paper, we discuss a simplified boundary modeling for numerical simulation of complex real resonator devices by prior scattering analysis. Appropriate boundary conditions are a crucial factor for accurate simulation of resonator devices. We propose to analyze the scattering of propagating eigenmodes at the substrate-to-membrane anchor of the resonating structure and show that model simplification is feasible, provided that the backscattered energy at the anchor/substrate boundary is small and the contribution of energy tunneling by evanescent modes is negligible. Exemplarily, we analyze the model of a film bulk acoustic resonator (FBAR).
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