Simplified BEM Model for Fast and Accurate Simulation of Surface Acoustic Wave Devices

Takanao Suzuki,Kazuhiro Takigawa,Ryo Nakagawa,Ken-ya Hashimoto
DOI: https://doi.org/10.1109/ultsym.2018.8579674
2018-01-01
IUS
Abstract:This paper proposes a simplified boundary element method (BEM)for fast and accurate simulation of surface acoustic wave (SAW)devices where acoustic scattering at structural discontinuities is taken into account. The method is based on a formalism proposed by one of the authors but is expanded to a convolution integral form between the Green function and surface charge like BEM for the analysis of finite structures with arbitrary electrode configurations. Another significant merit is compatibility of the parameters required for the analysis with those for the coupling of modes analysis which have already been established for SAW device design.
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