Abstract:Surface Acoustic Wave (SAW) technology has been widely applied in the fields such as communication and sensing. The performance of SAW devices is significantly influenced by designs of their key component, Interdigital Transducers (IDTs), and thus Coupling of Modes (COM) theory has been used as one of the most employed design tools for SAW devices due to its fast computational speed. Accuracy of this model is primarily dependent upon the COM parameters, but the traditional approach to obtain these parameters is heavily relied on accuracy of the input material properties, which has become a key issue for successful applications of this model. This paper proposed a new strategy to utilize the results obtained from the COM model as a dataset and then employ five different machine learning models for performing regression analysis and accurately extracting the COM parameters. To validate the accuracy of this approach, experimental verifications were performed using a 128°Y-X LiNbO 3 based SAW resonator as an example. The machine learning model with the best predictive performance, i.e., Extreme Gradient Boosting, was used to predict the COM parameters corresponding to experimental results, which were subsequently used in conjunction with the COM model for further calculations and comparisons with the experimental results. Results showed that the calculated results exhibit the same trend of resonance Q-values as the experimental results, demonstrating its effective solution for accurately extracting COM parameters.

Precise Simulation of Surface Acoustic Wave Devices Using Frequency-Dependent Coupling-of-modes Parameters

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Modeling for High-Frequency Spurious Responses in Incredible High-Performance Surface Acoustic Wave Devices

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

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A Finite Element Simulation of Propagation Properties of Surface Acoustic Wave Resonator

3-D FEM simulation of piezoelectric boundary acoustic wave resonator

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

Influence of Coupling Between Rayleigh and SH SAWs on Rotated <inline-formula> <tex-math notation="LaTeX">$Y$ </tex-math> </inline-formula>-Cut LiNbO<sub>3</sub> to Their Propagations

Simplified BEM Model for Fast and Accurate Simulation of Surface Acoustic Wave Devices

The Modeling and Analysis of Surface Acoustic Wave Filter Based on IDT/AIN/LiNbO3

Modeling and Analysis of Lateral Propagation of Surface Acoustic Waves Including Coupling Between Different Waves.

Fem/Wideband Fmbem Coupling for Fluid-Structure Interaction Problem and 2d Acoustic Design Sensitivity Analysis

Multimode coupling of modes model for spurious responses on SiO2/LiNbO3 substrate

FEM/wideband FMBEM Coupling for Structural–acoustic Design Sensitivity Analysis

First-Order Perturbation Analysis of Nonlinear Signal Generation in Surface Acoustic Wave Resonators on LiTaO3/SiO2/Si Structure Based on Coupling-of-Modes Theory.

Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators