Abstract:Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, $$ (0001) - [10\bar{1}0]{\text{ZnO}} $$ or $$ (11\bar{2}0) - [0001]{\text{ZnO}} $$ directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the $$ (11\bar{2}0) - [0001] $$ structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

Propagation Characteristics of SAW on a ZnO/SiO2/high-velocity-substrate Structure

Analysis of SAW properties in ZnO/AlxGa1-xN/c-Al2O3 structures

Surface Acoustic Wave Devices Based on High Quality Temperature-Compensated Substrates

High-frequency and High-Temperature Stable Surface Acoustic Wave Devices on ZnO/SiO2/SiC Structure

Characteristics of surface acoustic waves in (11$$\bar 2$$ 0)ZnO film/ R-sapphire substrate structures

Influence of a Piezoelectric ZnO Intermediate Layer on Rayleigh Waves Propagating in Sc 43% AlN 57% /zno/diamond Hetero-Structures Subjected to Uniaxial Stress

Simulation of Temperature Compensated Waveguiding Layer Acoustic Wave Devices

Temperature-Compensated High-Frequency Surface Acoustic Wave Device

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Design Study on SAW Devices Based on ZnO/Si Structure

Enhanced Performance Of Zno/Sio2/Al2o3 Surface Acoustic Wave Devices With Embedded Electrodes

Propagation of leaky surface acoustic waves in a layered piezoelectric semiconductor structure

Enhanced Performance of ZnO/SiO 2 /Al 2 O 3 Surface Acoustic Wave Devices with Embedded Electrodes

Characteristics of surface acoustic waves in (11 2̅ 0)ZnO film/ R -sapphire substrate structures

Propagations of Rayleigh and Love Waves in ZnO Films/glass Substrates Analyzed by Three-Dimensional Finite Element Method

SAW velocity reduction and spurious modes suppression on the layer structure

A Novel Temperature Stable Composite Substrates for Surface Acoustic Wave Applications

Calculation of surface acoustic waves in a multilayered piezoelectric structure

Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

S0-like SAW mode resonator on LiNbO3/SiO2/SiC structure

Enhanced Coupling Coefficient in Dual-Mode ZnO/SiC Surface Acoustic Wave Devices with Partially Etched Piezoelectric Layer