Influence Of Fabrication Parameters On The Nanostructure Of Si-Nws Under Hf/Fe(No3)(3) Etching System

yongyin xiao,xiuhua chen,wenhui ma,shaoyuan li,yuping li,jiali he,hui zhang,jiao li
DOI: https://doi.org/10.3139/146.111187
2015-01-01
International Journal of Materials Research
Abstract:Large-area and oriented silicon nanowire arrays have been successfully fabricated through a two-step metal-assisted chemical etching process at room temperature. The effects of key fabrication parameters (AgNO3 concentration, Fe(NO3)(3) concentration, and etching time) on the silicon nanowire nanostructure were carefully investigated. The Raman spectra of silicon nanowires prepared under different etching times have been recorded and analyzed. The porosity and length of the nanowire increases with the increase in AgNO3 concentration from 0.002 mol L-1 to 0.1 mol L-1, which indicates that the re-dissolved Ag+ ions would work as the main oxidative species and catalyze the vertical and lateral etching of nanowires, leading to silicon nanowire growth and porous structure formation.
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