Ultrastable Eddy Current Displacement Sensor Working in Harsh Temperature Environments with Comprehensive Self-Temperature Compensation

Hongbo Wang,Bin Ju,Wei Li,Zhihua Feng

DOI: https://doi.org/10.1016/j.sna.2014.03.008

IF: 4.291

2014-01-01

Sensors and Actuators A Physical

Abstract:This paper proposes a method of self-temperature compensation for eddy current sensors (ECSs) during rapid temperature changes. The temperature drift of the sensor impedance caused by the probe coil and target temperature variations was discussed and analyzed. The proposed impedance measurement method can distinguish the temperature drift caused by the sensor coil and the eddy currents in the target, and eliminate both of them in real time. A prototype ECS was manufactured and tested. The temperature coefficients of the probe's inductance and resistance caused by the target and the coil were measured by a designed setup. The results show that the temperature drift of the inductance is mainly caused by the target, and that of the resistance is mainly from the coil itself which is much larger than the inductance's drift. The prototype ECS that uses this new comprehensive self-temperature compensation method achieved an ultra-low temperature drift of 4 nm/degrees(C) without any additional hardware or temperature sensor. It can work effectively even the environment temperature changes as fast as 10 degrees C/h. (C) 2014 Elsevier B.V. All rights reserved.