Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

Chao Xu,Junbo Wang,Deyong Chen,Jian Chen,Wenjie Qi,Bowen Liu,Tian Liang,Xu She

DOI: https://doi.org/10.3390/mi12040387

IF: 3.4

2021-04-02

Micromachines

Abstract:Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them unable to work as expected. This paper studied the temperature characteristics of electrochemical seismic sensors based on MEMS (micro–electro–mechanical systems), and analyzed the influences of the temperature effects on the open-loop and closed-loop amplitude-frequency curves. Most importantly, the temperature compensation circuits based on thermistors were developed, which effectively adjusted pole frequencies and sensitivity coefficients, and finally realized the real-time temperature compensation for both open-loop and closed-loop measurements for the first time. The results showed that in the temperature range of −10 °C ~ +40 °C, and with the 3 dB bandwidth range of 0.01 Hz ~ 40 Hz, the change of the maximum sensitivity was reduced from about 25 dB before temperature compensation to less than 2 dB after temperature compensation.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the influence of temperature changes on the performance of MEMS - based electrochemical seismic sensors and how to reduce this influence through temperature compensation circuits. Specifically:

1. **Influence of Temperature on Sensor Performance**: The paper points out that due to temperature changes, the sensitivity of electrochemical seismic sensors will be severely affected. Temperature changes can affect the ion diffusion coefficient, the viscosity of the electrolyte, the electrochemical reaction rate, and the elastic coefficient of the elastic membrane. These factors work together, resulting in a significant decline in the performance of the sensor at different temperatures.

2. **Research and Implementation of Temperature Compensation Methods**: In order to overcome the above problems, the paper has studied the influence of temperature on the amplitude - frequency characteristics of electrochemical seismic sensors and developed a temperature compensation circuit based on thermistors. This circuit can adjust the pole frequency and sensitivity coefficient in real - time, thus achieving real - time temperature compensation for open - loop and closed - loop measurements.

3. **Experimental Verification**: The experimental results show that in the temperature range from - 10°C to + 40°C and the bandwidth range from 0.01 Hz to 40 Hz, through temperature compensation, the change in maximum sensitivity is reduced from approximately 25 dB before compensation to less than 2 dB after compensation.

In conclusion, the main objective of this paper is to propose an effective temperature compensation method through theoretical analysis and experimental verification to improve the stability and reliability of MEMS - based electrochemical seismic sensors under different temperature conditions.