Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments
Xitong Yu,Liping Jiang,Qiang Luan,Yukui Cai,Qinghua Song,Bing Wang,Zhanqiang Liu
DOI: https://doi.org/10.1016/j.ceramint.2022.12.217
IF: 5.532
2023-05-01
Ceramics International
Abstract:Silicon nitride (Si3N4) has excellent thermostability, low density, corrosion resistance, high mechanical strength. Therefore, it is widely used in the aerospace and military field. Femtosecond laser ablation is a potential method to fabricate micro features on silicon nitride surfaces, however thermal accumulation effect is a non-negligible challenge. In this paper, a comprehensive investigation of laser ablation of silicon nitride under different auxiliary processing environments were conducted in ambient air, water-confined environment and low temperature, accompanied with analysis of ablation depth, surface roughness, SEM topography and EDS detection. The experimental results showed that the laser ablation performed in ambient air would form obvious ablation depth, the depth would increase with number of ablation layers increased, but its surface roughness would be lager due to the thermal accumulation effect. The laser machining in low temperature could suppress the plasma shielding effect, enlarge ablation depth and reduce the degree of thermal damage. Besides that, it could also reduce the oxidation and surface roughness. The water-confined laser ablation could restrain the oxidation effectively, but it caused bubbles attaching on the machined surface, distortion of machined region, decreasing of material removal rate and other negative phenomena either. Moreover, the surface roughness increased and laser ablation depth decreased with the scanning speed increasing. Hence, femtosecond laser ablation under low temperature could improve the surface quality and reduce the thermal accumulation effect significantly.
materials science, ceramics