Abstract:We explore the source of nonlinearities in Aluminum Nitride (AlN) Contour Mode Resonators (CMRs) operating in the Very High Frequency (VHF) range. We demonstrate that the red-shift of the resonance frequency found in VHF CMRs when the input RF power increases is due to nonlinear stiffness appearing from self-heating, and variable damping due to geometric nonlinearities. Moreover, we find a linear relationship between the variable damping coefficient and the resonator quality factor (Q). Such nonlinear mechanisms are modeled using a spring-mass-damper physical system and, in the electrical domain, a modified Butterworth-Van Dyke (MBVD) circuit where the nonlinear stiffness and variable damping are captured by a charge-dependent motional capacitor and a charge-dependent motional resistor, respectively. Detailed guidelines are provided to accurately analyze nonlinear CMRs using full-wave numerical simulations based on a finite-element method. Such simulations allow us to isolate the influence of each independent nonlinear mechanism and establish a relation between variable damping and geometric nonlinearities. Circuit and full-wave numerical simulations are in good agreement with measured data from fabricated 225 MHz CMRs exhibiting different Q. Finally, we exploit nonlinearities in high-Q CMRs to generate frequency combs at the MHz range opening the door to new exciting applications in telecommunication and sensing.

Nonlinearities in a high-Q SOI Lamé-mode bulk resonator

A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

A Novel Lamé Mode RF-MEMS resonator with high quality factor

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

Study of the bandgap characteristics of a locally resonant phonoic crystal beam with attached double oscillators in parallel

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

A near spurious-free 6 GHz LLSAW resonator with large electromechanical coupling on X-cut LiNbO3/SiC bilayer substrate

A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000

Nonlinear response of very high frequency contour mode resonators

Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators Toward a Unified Quality Factor Model.

Topology optimization of high-performance optomechanical resonator

Quality Factor of Silicon-on-insulator Integrated Optical Ring Resonator

Broadband high-Q multimode silicon concentric racetrack resonators for widely tunable Raman lasers

Elastic Mode Semicircular Beams Resonator Oscillator with Weakened Nonlinearities

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

Waveguide-resonator Coupling Structure Design in the Lithium Niobate on Insulator for Χ （2） Nonlinear Applications

High frequency lithium niobate film-thickness-mode optomechanical resonator