MEMS Sensors and Wireless Telemetry for Distributed Systems

CL Britton,RJ Warmack,SF Smith,PI Oden,GA Brown,WL Bryan,LG Clonts,MG Duncan,MS Emery,MN Ericson,Z Hu,RL Jones,MR Moore,JA Moore,JM Rochelle,TD Threatt,T Thundat,GW Turner,AL Wintenberg

DOI: https://doi.org/10.1117/12.320161

1998-01-01

Abstract:Selectively coated cantilevers are being developed at ORNL for chemical and biological sensing. The sensitivity can exceed that of other electro-mechanical devices as parts-per-trillion detection can be demonstrated for certain species. We are now proceeding to develop systems that employ electrically readable microcantilevers in a standard MEMS process and standard CMOS processes. One of our primary areas of interest is chemical sensing for environmental applications. Towards this end, we are presently developing electronic readout of a mercury-sensitive coated cantilever. In order to field arrays of distributed sensors, a wireless network for data reporting is needed. For this, we are developing on-chip spread-spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Most of the RF circuitry we have designed and fabricated in 0.5 mu m CMOS has been tested and verified operational to above 1 GHz. Our initial intended operation is for use in the 915 MHz Industrial, Scientific, and Medical (ISM) band. This paper presents measured data on the microcantilever-based mercury detector. We will also present design data and measurements of the RF telemetry chip.