Abstract:The densification of vertically-aligned carbon nanotube arrays into solid-like coatings is highly desirable for certain applications, including those requiring increased robustness or hardness, protection from oxygen at high temperatures and other damaging ambients, or increased effective thermal conductance. Chemical vapor infiltration (CVI) is a technique that essentially extends the commonly-used chemical vapor deposition process to the filling of networks of pores within a fibrous preform by altering the deposition kinetics toward a mass-transfer limited process. In this study, the CVI technique was utilized for filling the space around carbon nanotubes in vertically-aligned arrays on SiO2 substrates with a novel but simple approach. Nanotube growth was conducted using a vapor phase catalyst delivery method in a chemical vapor deposition chamber at 770 degC with a mixture of xylene and ferrocene vapors. Once the nanotube growth had ended, the conditions were altered to initiate the infiltration of carbon-containing species into the nanotube array, resulting in carbon deposition on the nanotubes. The extent of infiltration and location of the remaining porosity was determined using SEM analysis and microbalance measurements, for infiltration times up to 10 hours. The type of C-C bonding within the densified films was elucidated using Raman scattering. Vickers microhardness measurements were made to determine the hardness of carbon-densified nanotube arrays. These studies were largely motivated by the anticipated use of carbon nanotubes for on-chip thermal management on wide bandgap high-power semiconductor devices, optical devices, MEMS structures, and nanoscaled electronics

Synthesis of high quality, closely packed vertically aligned carbon nanotube array and a quantitative study of the influence of packing density on the collective thermal conductivity

Facile Synthesis of High Density Carbon Nanotube Array by a Deposition-Growth-densification Process

Novel Three-Dimensional Carbon Nanotube Networks As High Performance Thermal Interface Materials

High-Quality Vertically Aligned Carbon Nanotubes for Applications as Thermal Interface Materials

Parametric Study of Intrinsic Thermal Transport in Vertically Aligned Multi-Walled Carbon Nanotubes Using a Laser Flash Technique

Improved thermal conductivities of vertically aligned carbon nanotube arrays using three-dimensional carbon nanotube networks

Array Volume Fraction-Dependent Thermal Transport Properties of Vertically Aligned Carbon Nanotube Arrays

Study on Thermal Interface Material Using Vertically Aligned Carbon Nanotube

Dense Vertically Aligned Multiwalled Carbon Nanotube Arrays As Thermal Interface Materials

Coating-boosted Interfacial Thermal Transport for Carbon Nanotube Array Nano-Thermal Interface Materials

Quality Control of Vertically Aligned Carbon Nanotubes Grown by Chemical Vapor Deposition

Surface-Restrained Growth Of Vertically Aligned Carbon Nanotube Arrays With Excellent Thermal Transport Performance

Uniform Patterned Synthesis of Vertically-Aligned Carbon Nanotubes on Low-Stress Micromechanical Structures

Preparation of VACNT TIM by a Novel Metallization and Chemical Bonding Process

Remarkably Enhanced Thermal Transport Based on a Flexible Horizontally-Aligned Carbon Nanotube Array Film

Dependence of Carbon Nanotube Array-Silicon Interface Thermal Conductance on Array Arrangement and Filling Fraction

Double-Sided Transferred Carbon Nanotube Arrays for Improved Thermal Interface Materials

Wafer-Scale Transfer Of Vertically Aligned Carbon Nanotube Arrays

Enhancing Thermal Conductive Performance of Vertically Aligned Carbon Nanotube Array Composite by Pre-Annealing Treatment.

Densified Vertically-Aligned Carbon Nanotube Arrays by Chemical Vapor Infiltration

Encapsulated carbon nanotube array as a thermal interface material compatible with standard electronics packaging