Abstract:With the popularity of 5G technique, large bandwidth devices are urgently needed to meet the enormous transmission requirements. Recently, the shear horizontal (SH) surface acoustic wave (SAW) resonators with large effective coefficient (k 2 <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</inf> ) attracted wide attention, however, obtaining a high quality-factor (Q) is still a great challenge due to the bulk acoustic wave radiation into the substrate. In this work, a 30° YX-LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> /SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> /Si Non-leaky Stack SAW (NS-SAW) resonator with SH mode is proposed. Large velocity difference between the SHSAW wave in LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> layer and the slow shear bulk acoustic wave in SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> /Si substrate helps to reduce the bulk wave leakage. Numerical simulations by finite element method (FEM) are implemented to optimize the cut angle of LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> film and the thickness of each layer. The fabricated NS-SAW resonators yield a k 2 <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</inf> of 24.4% and a Bode-Q <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">max</inf> of 1092. Compared to the reported similar-type SAW resonators, the NS-SAW resonator shows the best level of figure of merit (FoM=266) when k 2 <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</inf> is more than 20%, presenting great potential for designing the wide bandwidth devices in 5G wireless communication.

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