Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

Terahertz Imaging With Micro-Bridge Structure Detector Array And 2.52thz Far Infrared Laser

Detection Of Terahertz Radiation From 2.52 Thz Co2 Laser Using A 320 X 240 Vanadium Oxide Microbolometer Focal Plane Array

Fabrication and Parameters Calculation of Room Temperature Terahertz Detector with Micro-Bridge Structure

Detection Of Terahertz Radiation Using Improved Uncooled Focal Plane Array Detector

300 GHz Vector Imaging System Based on Self-Mixing Detection

Enhancement of Real-Time THz Imaging System Based on 320 × 240 Uncooled Microbolometer Detector

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

Spiral Antenna-Coupled Microbridge Structures for THz Application

Ultrafast voltage-tunable detectors for Terahertz radiation operating above 100K

2.52-Thz Scanning Reflection Imaging and Image Preprocessing

High Terahertz Transmittance and Blocking IR Background Noise Package Window Design for Terahertz Focal Plane Array Detectors

Terahertz detecting method using multi-reflection optical lever

Turn-key compact high temperature terahertz quantum cascade lasers: imaging and room temperature detection

Investigation on 2.45-Thz Array Transmission Imaging

A Terahertz Confocal Microscope for Far-Field Thermal Radiation Detection and Near-Field Sub-Wavelength Imaging

Real‐Time THz Beam Profiling and Monitoring Via Flexible Vertically Aligned Carbon Nanotube Arrays

CW THz Scanning Transmission Imaging for Concealed Object Detection

Near-field terahertz probes with room-temperature nanodetectors for subwavelength resolution imaging

Frequency Modulation and Absorption Improvement of THz Micro-bolometer with Micro-bridge Structure by Spiral-Type Antennas

Phase-sensitive terahertz imaging using room-temperature near-field nanodetectors

Preparation of room temperature terahertz detector with lithium tantalate crystal and thin film