Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

Detection Of Terahertz Radiation From 2.52 Thz Co2 Laser Using A 320 X 240 Vanadium Oxide Microbolometer Focal Plane Array

Terahertz Imaging With Micro-Bridge Structure Detector Array And 2.52thz Far Infrared Laser

Enhancement of Real-Time THz Imaging System Based on 320 × 240 Uncooled Microbolometer Detector

Detection Of Terahertz Radiation Using Improved Uncooled Focal Plane Array Detector

300 GHz Vector Imaging System Based on Self-Mixing Detection

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

Carbon monoxide gas detection system based on VCSEL using TDLAS technology

2.24 THz laser real-time imaging experiments for concealed object detection

Low-Noise Readout Integrated Circuit for Terahertz Array Detector

Real‐Time THz Beam Profiling and Monitoring Via Flexible Vertically Aligned Carbon Nanotube Arrays

Continuous-wave coherent imaging with terahertz quantum cascade lasers using electro-optic harmonic sampling

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

2.52-Thz Scanning Reflection Imaging and Image Preprocessing

Fabrication and Characterization of Linear Terahertz Detector Arrays Based on Lithium Tantalate Crystal

Low Cost Thermopile Detectors for THz Imaging and Sensing

Performance of the Continuous-Wave Imaging System Based on a Terahertz Gas Laser

Carbon nanotube terahertz detector.

Real-time terahertz scanning imaging by use of a pyroelectric array camera and image denoising.

Resolution measurement of a 2.52 THz continuous-wave terahertz scanning imaging system

Investigation on 2.45-Thz Array Transmission Imaging

Terahertz and Infrared Uncooled Detector Based on a Microcantilever as a Radiation Pressure Sensor