Terahertz detecting method using multi-reflection optical lever

Liu Xiaomin,Wang Junqiao,Ma Fengying,Wu Yu,Liang Erjun,Yang Guoguang

DOI: https://doi.org/10.3969/j.issn.1007-2276.2012.08.018

2012-01-01

Infrared and Laser Engineering

Abstract:A new micro-optical method for Terahertz radiation measurement was presented,which was based on optical lever and thermal radiation detection.A bi-material micro cantilever was used to generate micro-deformation caused by Terahertz radiant thermal effect,and the micro-deformation was measured by a multiple reflection optical lever composed of a pair of plane mirrors.Then radiation power of Terahertz waves were obtained.Micro-displacement theoretical resolution of this multiple reflection optical lever method could be less than 1 nm and a measuring system was set up to verify it.Experiments show that theoretical resolution of this test system is less than 4 nm and its actual resolution was less than 10 nm.Designs and parameters of a Terahertz detector based on this method were given.This approach had many advantages such as anti-air turbulence,anti-beam cross-talk,and working at room temperature.So this new method was suitable for realizing miniaturized Terahertz detectors with the features of uncooled,real-time,low-cost,and it was also appropriate for manufacturing array detectors for imaging detection.