Abstract:Imaging systems operating in the terahertz part of the electromagnetic spectrum are in great demand because of the distinct characteristics of terahertz waves in penetrating many optically-opaque materials and providing unique spectral signatures of various chemicals. However, the use of terahertz imagers in real-world applications has been limited by the slow speed, large size, high cost, and complexity of the existing imaging systems. These limitations are mainly imposed due to the lack of terahertz focal-plane arrays (THz-FPAs) that can directly provide the frequency-resolved and/or time-resolved spatial information of the imaged objects. Here, we report the first THz-FPA that can directly provide the spatial amplitude and phase distributions, along with the ultrafast temporal and spectral information of an imaged object. It consists of a two-dimensional array of ~0.3 million plasmonic photoconductive nanoantennas optimized to rapidly detect broadband terahertz radiation with a high signal-to-noise ratio. As the first proof-of-concept, we utilized the multispectral nature of the amplitude and phase data captured by these plasmonic nanoantennas to realize pixel super-resolution imaging of objects. We successfully imaged and super-resolved etched patterns in a silicon substrate and reconstructed both the shape and depth of these structures with an effective number of pixels that exceeds 1-kilo pixels. By eliminating the need for raster scanning and spatial terahertz modulation, our THz-FPA offers more than a 1000-fold increase in the imaging speed compared to the state-of-the-art. Beyond this proof-of-concept super-resolution demonstration, the unique capabilities enabled by our plasmonic photoconductive THz-FPA offer transformative advances in a broad range of applications that use hyperspectral and three-dimensional terahertz images of objects for a wide range of applications.

Performance Enhanced Terahertz Imaging Using a High-Response Thermomechanical Microcantilever FPA

Three-Dimensional Terahertz Computed Tomography Imaging Based on Thermomechanical Microcantilever Focal Plane Array

A Dual-Band Terahertz Focal Plane Array for Material Composition Identification by Spectral Imaging

High-performance THz Metamaterial Absorber

Defect Detections of Polymers Materials Based on Bi-Material Microcantilever FPA at 3.1Thz

Metamaterial-integrated Non-electric Focal Plane Array for Real-time Terahertz Imaging

Substrate-free THz focal plane metamaterial array with high absorption ratio

Photomechanical Meta-Molecule Array for Real-Time Terahertz Imaging.

Imaging and Characteristics of a Bimaterial Microcantilever FPA Fabricated using Bulk Silicon Processes

Design, Fabrication, and Characterization of A Polymer-Based Mems Uncooled Infrared Focal Plane Array

Uncooled Multi-Band IR Imaging Using Bimaterial Cantilever FPA

Plasmonic photoconductive terahertz focal-plane array with pixel super-resolution

Uncooled Infrared Imaging Device Based on Optimized Optomechanical Micro-Cantilever Array

Tunable Terahertz Metamaterial Absorber Actuated by Thermomechanical Bimaterial Microcantilevers

A bulk micromachined cantilever array for uncooled infrared imaging

Design And Fabrication Of A High Sensitivity Focal Plane Array For Uncooled Ir Imaging

A Terahertz Optomechanical Detector Based on Metasurface and Bi-Material Micro-Cantilevers

Development Of Infrared Fpa Using Bimaterial Microcantilever Arrays

Performance Enhancement of Bimaterial Cantilever Focal Plane Array by Metamaterial Absorber

Surface Micromachined Cantilever Arrays for Infrared Imaging

Design of a Novel Substrate-Free Double-Layer-Cantilever FPA Applied for Uncooled Optical-Readable Infrared Imaging System