Abstract:This paper describes the design and performances of a novel focal-plane array (FPA) containing pixels of double bimaterial-layer cantilevers without silicon (Si) substrate for being applied in the uncooled optical-readable infrared (IR) imaging system. The top layer of the cantilever pixels is made of two materials with large mismatching thermal expansion coefficients: silicon nitride (SiNx) and gold (Au), which convert IR heat into mechanical deflection. The bottom layer is SiNx cantilever, which partially serves thermal isolation legs. The top and bottom pads form the resonant cavity, which can dramatically enhance the absorption of incident IR irradiation, and the substrate-free configuration enables reducing the loss of incident IR energy. Responding to the IR source with spectral range from 8 to 14 mum, the IR imaging system may receive an IR images through visible optical readout method. A thermal-mechanical model for such cantilever microstructure is proposed, and the thermal and thermal-mechanical coupling field characteristics of the cantilever microstructure are optimized through numerical analysis method and simulation by using the finite-element method. The thermal-mechanical deflection simulated is 7.2 mum/K, generally in good agreement with what the thermal-mechanical model and numerical analysis forecast. The analysis suggests that the detection resolution of current design is 0.03 K, whereas the noise analysis from FPA indicates the current resolution to be around 100 muK and the limit noise-equivalent temperature difference (NETD) of the IR imaging system can reach to 7 mK.

Development Of Infrared Fpa Using Bimaterial Microcantilever Arrays

Surface Micromachined Cantilever Arrays for Infrared Imaging

Imaging and Characteristics of a Bimaterial Microcantilever FPA Fabricated using Bulk Silicon Processes

Uncooled Focal Plane Array for Multiband IR Imaging Using Optical-Readout Bimaterial Cantilevers

Uncooled Multi-Band IR Imaging Using Bimaterial Cantilever FPA

Uncooled Infrared Imaging Using a Substrate-Free Focal-Plane Array

Design of a Novel Substrate-Free Double-Layer-Cantilever FPA Applied for Uncooled Optical-Readable Infrared Imaging System

Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure

Imaging of the Mid-Infrared Focal Plane Array with a Modified Read-Out Circuit.

Design, Fabrication, and Characterization of A Polymer-Based Mems Uncooled Infrared Focal Plane Array

Design And Fabrication Of A High Sensitivity Focal Plane Array For Uncooled Ir Imaging

A bulk micromachined cantilever array for uncooled infrared imaging

Advance in Optically Readable Uncooled Infrared Imaging

Design Realization and Characterization of A Position Sensitive Detector for Fast Optical Measurement

A Novel MEMS-based Focal Plane Array for Infrared Imaging

Uncooled Infrared Imaging Device Based on Optimized Optomechanical Micro-Cantilever Array

An uncooled optically readable infrared imaging detector

Development of a High Performance 1280×1024 InGaAs SWIR FPA Detector at Room Temperature

Ir Imaging Using A Cantilever-Based Focal Plane Array Fabricated By Deep Reactive Ion Etching Technique

A New Structure of Cantilever-Based Infrared Focal-Plane Array

Thermal and Mechanical Characterizations of A Substrate-Free Focal Plane Array