Operando diagnostic detection of interfacial oxygen ‘breathing’ of resistive random access memory by bulk-sensitive hard X-ray photoelectron spectroscopy
Gang Niu,Pauline Calka,Peng Huang,Sankaramangalam Ulhas Sharath,Stefan Petzold,Andrei Gloskovskii,Karol Fröhlich,Yudi Zhao,Jinfeng Kang,Markus Andreas Schubert,Florian Bärwolf,Wei Ren,Zuo-Guang Ye,Eduardo Perez,Christian Wenger,Lambert Alff,Thomas Schroeder
DOI: https://doi.org/10.1080/21663831.2018.1561535
2019-01-04
Materials Research Letters
Abstract:The HfO2-based resistive random access memory (RRAM) is one of the most promising candidates for non-volatile memory applications. The detection and examination of the dynamic behavior of oxygen ions/vacancies are crucial to deeply understand the microscopic physical nature of the resistive switching (RS) behavior. By using synchrotron radiation based, non-destructive and bulk-sensitive hard X-ray photoelectron spectroscopy (HAXPES), we demonstrate an operando diagnostic detection of the oxygen ‘breathing’ behavior at the oxide/metal interface, namely, oxygen migration between HfO2 and TiN during different RS periods. The results highlight the significance of oxide/metal interfaces in RRAM, even in filament-type devices. The oxygen ‘breathing’ behavior at the oxide/metal interface of filament-type resistive random access memory devices is operandoly detected using hard X-ray photoelectron spectroscopy as a diagnostic tool.
materials science, multidisciplinary